JPH0715136Y2 - ウエハ回転装置 - Google Patents

ウエハ回転装置

Info

Publication number
JPH0715136Y2
JPH0715136Y2 JP2965288U JP2965288U JPH0715136Y2 JP H0715136 Y2 JPH0715136 Y2 JP H0715136Y2 JP 2965288 U JP2965288 U JP 2965288U JP 2965288 U JP2965288 U JP 2965288U JP H0715136 Y2 JPH0715136 Y2 JP H0715136Y2
Authority
JP
Japan
Prior art keywords
wafer
center
centering cup
rotary table
pins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2965288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01133738U (en]
Inventor
和洋 妹尾
徹雄 安保
輝彦 岡部
真 中沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP2965288U priority Critical patent/JPH0715136Y2/ja
Publication of JPH01133738U publication Critical patent/JPH01133738U/ja
Application granted granted Critical
Publication of JPH0715136Y2 publication Critical patent/JPH0715136Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP2965288U 1988-03-05 1988-03-05 ウエハ回転装置 Expired - Lifetime JPH0715136Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2965288U JPH0715136Y2 (ja) 1988-03-05 1988-03-05 ウエハ回転装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2965288U JPH0715136Y2 (ja) 1988-03-05 1988-03-05 ウエハ回転装置

Publications (2)

Publication Number Publication Date
JPH01133738U JPH01133738U (en]) 1989-09-12
JPH0715136Y2 true JPH0715136Y2 (ja) 1995-04-10

Family

ID=31254046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2965288U Expired - Lifetime JPH0715136Y2 (ja) 1988-03-05 1988-03-05 ウエハ回転装置

Country Status (1)

Country Link
JP (1) JPH0715136Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4038653B2 (ja) * 2001-12-03 2008-01-30 株式会社安川電機 ウェハ搬送フォーク
DE102007005208A1 (de) * 2007-01-29 2008-07-31 Suss Microtec Test Systems Gmbh Verfahren zum Prüfen elektronischer Bauelemente und Prüfvorrichtung zur Durchführung des Verfahrens
JP5478187B2 (ja) * 2009-10-13 2014-04-23 トーヨーエイテック株式会社 ワークの芯出し装置
JP2021135257A (ja) * 2020-02-28 2021-09-13 株式会社ミツトヨ ワーク設置治具

Also Published As

Publication number Publication date
JPH01133738U (en]) 1989-09-12

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